Chinaβs DUV lithography still lags ASML by four generations

Media reports published earlier this week about Chinaβs plan to start making its own immersion deep ultraviolet (DUV) lithography machines have caused a sharp sell-off of European chip equipment stocks. But Chinese pundits say the situation remains very far from a point where Chinaβs DUV machines coukd compete with ASMLβs. The Information reported Monday that [β¦]
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